Error-reduced channeled spectroscopic ellipsometer with palm-size sensing head.

One-dimensional Spectroscopic Measurement of Patterned Structures Using a Custom-built Spectral Imaging Ellipsometer

A novel spectral imaging ellipsometer based on a mono-axial power spectrograph has been developed for one-dimensional spectroscopic measurement of patterned structures. To obtain the imaging data of a patterned sample using ellipsometry can be realized by conventional ellipsometers with 2-dimesional (2D) scanning sample stage or 2D imaging ellipsometers with imaging optics. The former has major...

Zone-averaged method to minimize polarizer and analyzer imperfections in a phase-modulated spectroscopic ellipsometer

We have theoretically investigated the effects of polarizer and analyzer imperfections in a phase-modulated spectroscopic ellipsometer adopting a photoelastic modulator. Jones matrices having off-diagonal elements have been introduced to represent the imperfections of the polarizer and analyzer, and the effects of the imperfections were analytically derived to the first-order approximation. It ...

A novel setup for spectroscopic ellipsometry using an acousto-optic tuneable filter

A rotating-analyzer ellipsometer for fast measurements at multiple wavelengths as well as for spectroscopic measurements has been developed. The most important ,novelty of the setup is the use of an acousto-optic tuneable filter (AOTF) as dispersing element. This offers advantages with respect to the speed of measurement, the adjustment of the intensity of the light, the use of lock-in techniqu...

Spectroscopic Ellipsometer and Polarimeter Systems

Synchrotron radiation-based far-infrared spectroscopic ellipsometer with full Mueller-matrix capability.

We developed far-IR spectroscopic ellipsometer at the U4IR beamline of the National Synchrotron Light Source in Brookhaven National Laboratory. This ellipsometer is able to measure both, rotating analyzer and full-Mueller matrix spectra using rotating retarders, and wire-grid linear polarizers. We utilize exceptional brightness of synchrotron radiation in the broad spectral range between about ...